Welcome to The Advanced Micro and Nanosystems Laboratory
MEMS, or Micro-Electro Mechanical Systems, are integrated micro devices or integrated systems combining both electrical and mechanical components. Typical examples of MEMS devices are sensors (pressure, velocity), microactuators (micro-mirrors, switches). Important characteristics of MEMS are their sub-millimeter size along with parallel mass production, based on photolithography and integrated circuit (IC) processing technology.
Recently MEMS has become increasingly popular in many areas of science and engineering and current applications include micro-actuators, accelerometers, biosensors, pressure, chemical, motion and flow sensors, micro-optics, optical scanners, projection display chip, ink jet nozzle arrays, and fluid pumps and valves.
The Advanced Microsystems Laboratory specializes in the development of microactuators and sensors based on various physical phenomena including electrostatic, thermal, electro-magnetic, piezo-electric, piezo-resistive, and electroactive transduction.
Additionally, our laboratory is developing a variety of custom electronic interfaces needed in the acquisition of signals from these devices. One common characteristic of these systems is the use of low-cost micro-controllers (primarily from Microchip Inc.), which allow us to develop relatively sophisticated experiments at a fraction of the cost of a general-purpose bench-top instruments.
Amuzing: Oliver's recent paper in a Wordle format
